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Elastic and Plastic Deformation of Densified SiO2 Films

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Abstract

Structural relaxation of densified SiO2 films prepared by plasma ion-assisted deposition was correlated to the center wavelength shift of the related ultraviolet narrow bandpass filters at various temperatures. Reversible and irreversible center wavelength shift were attributed to film elastic and plastic deformation, respectively.

© 2007 Optical Society of America

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