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Conferences > OIC > 2007 > ThB > ThB8

Measurement of the mechanical properties of TiO2 thin films deposited by electron beam evaporation

Takashi Inomata, Tomonori Aoki, and Shigetaro Ogura

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Abstract

The TiO2 thin films were deposited on BK7 glass adopting electron beam deposition process. In this paper, the influence of the working pressure on the mechanical properties has been investigated. As the results, both of the adhesion and hardness were decreased with increasing working pressure, and with increasing working pressure, respectively.

© 2007 Optical Society of America

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