Investigations of MgF2 optical thin films with ultra-low refractive indices prepared from autoclaved sols

Tsuyoshi Murata; Hitoshi Ishizawa; Akira Tanaka

doi:10.1364/OIC.2007.ThD11

Optical Interference Coatings
OSA Technical Digest (CD) (Optica Publishing Group, 2007),
paper ThD11
•https://doi.org/10.1364/OIC.2007.ThD11

Investigations of MgF₂ optical thin films with ultra-low refractive indices prepared from autoclaved sols

Tsuyoshi Murata, Hitoshi Ishizawa, and Akira Tanaka

Optical Interference Coatings 2007

Tucson, Arizona United States
3–8 June 2007
ISBN: 1-55752-841-1

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Applications II / Antireflection Coatings (ThD)

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T. Murata, H. Ishizawa, and A. Tanaka, "Investigations of MgF2 optical thin films with ultra-low refractive indices prepared from autoclaved sols," in Optical Interference Coatings, OSA Technical Digest (CD) (Optica Publishing Group, 2007), paper ThD11.

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Abstract

We have confirmed that our porous MgF₂ coatings can be uniformly formed on φ 300 mm substrates as a single coating and as a hybrid coating with sublayers formed by physical vapor deposition.

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