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Crystal Phase Transition of HfO2 Films Evaporated by Plasma Ion-Assisted Deposition

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Abstract

HfO2 film structure and optical property were evaluated by a variable angle spectroscopic ellipsometry, indicating crystal phase transition as a result of plasma ion momentum transfer during deposition. The film inhomogeneity, surface roughness and crystal phase were confirmed by SEM cross-section, AFM and XRD measurements.

© 2007 Optical Society of America

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