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Conferences > OIC > 2007 > TuB > TuB1

Mechanical Properties of Thin Films

Frank Richter, Thomas Chudoba, and Norbert Schwarzer

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Abstract

A novel approach to mechanical properties of thin films based on combined nanoindentation and theoretical modelling is presented. The approach enables the determination of mechanical film parameters and predictive modelling of mechanical behaviour of thin films.

© 2007 Optical Society of America

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