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Conferences > OIC > 2007 > TuB > TuB4

Stress measurement of Al film deposited on flexible substrates by shadow moiré method

Kuan-Shiang Lee, Chien-Jen Tang, Hsi-Chao Chen, and Cheng-Chung Lee

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Abstract

Shadow moiré method used to measure stress of thin film on flexible substrates was proposed. For Al film deposited on poly imi de substrate, using DC magnetron sputtering, the corresponding tensile stress is 0.450±0.042GPa.

© 2007 Optical Society of America

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