Residual Stress of Obliquely Deposited MgF2 Thin Films

Cheng-Chung Jaing; Ming-Chung Liu; Cheng-Chung Lee; Wen-Hao Cho; Wei-Ting Shen; Chien-Jen Tang

doi:10.1364/OIC.2007.TuB6

Optical Interference Coatings
OSA Technical Digest (CD) (Optica Publishing Group, 2007),
paper TuB6
•https://doi.org/10.1364/OIC.2007.TuB6

Residual Stress of Obliquely Deposited MgF₂ Thin Films

Cheng-Chung Jaing, Ming-Chung Liu, Cheng-Chung Lee, Wen-Hao Cho, Wei-Ting Shen, and Chien-Jen Tang

Optical Interference Coatings 2007

Tucson, Arizona United States
3–8 June 2007
ISBN: 1-55752-841-1

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Coating Stress (TuB)

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C. Jaing, M. Liu, C. Lee, W. Cho, W. Shen, and C. Tang, "Residual Stress of Obliquely Deposited MgF2 Thin Films," in Optical Interference Coatings, OSA Technical Digest (CD) (Optica Publishing Group, 2007), paper TuB6.

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Abstract

Effects of columnar angles on the residual stress of MgF₂ films were investigated. The MgF₂ films with a columnar microstructure were obliquely deposited on glass substrates by means of resistive heating evaporation.

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