Tools for Improving Precision Optical Coatings Through E-Beam Sweep Design

Michael Gevelber; Michael Gevelber; Michael Gevelber; Bing Xu; Bing Xu; Bing Xu; Gregory Reimann; Gregory Reimann; Gregory Reimann

doi:10.1364/OIC.2007.TuCPDP1

Optical Interference Coatings
OSA Technical Digest (CD) (Optica Publishing Group, 2007),
paper TuCPDP1
•https://doi.org/10.1364/OIC.2007.TuCPDP1

Tools for Improving Precision Optical Coatings Through E-Beam Sweep Design

Michael Gevelber, Bing Xu, and Gregory Reimann

Optical Interference Coatings 2007

Tucson, Arizona United States
3–8 June 2007
ISBN: 1-55752-841-1

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Birefringent Coatings / Polarizer Coatings (TuC)

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M. Gevelber, B. Xu, and G. Reimann, "Tools for Improving Precision Optical Coatings Through E-Beam Sweep Design," in Optical Interference Coatings, OSA Technical Digest (CD) (Optica Publishing Group, 2007), paper TuCPDP1.

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Abstract

Major e-beam nonlinearities are identified by a vision system in a production coater. A silica evaporation model is used to investigate deposition rate dynamics and source thermal distribution to develop improved sweep designs for subliming materials.

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