Abstract
We report developments in real-time deposition control of the fabrication of broadband multilayer optical designs with demanding specifications. A combination of real-time ellipsometric monitoring and automated deposition control was used to achieve the required performance.
© 2007 Optical Society of America
PDF ArticleMore Like This
Svetlana Dligatch and Roger P. Netterfield
TuE5 Optical Interference Coatings (OIC) 2004
David J. Drage and Roger P. Netterfield
ThE.9 Optical Interference Coatings (OIC) 1998
S. Atarah, A. Voronov, S. Song, and F. Placido
TuC9 Optical Interference Coatings (OIC) 2010