Sensitive optical monitoring with error compensation

Kai Wu; Sheng-Hui Chen; Ming-Sheng Chang; Cheng-Chung Lee

doi:10.1364/OIC.2007.WC6

Optical Interference Coatings
OSA Technical Digest (CD) (Optica Publishing Group, 2007),
paper WC6
•https://doi.org/10.1364/OIC.2007.WC6

Sensitive optical monitoring with error compensation

Kai Wu, Sheng-Hui Chen, Ming-Sheng Chang, and Cheng-Chung Lee

Optical Interference Coatings 2007

Tucson, Arizona United States
3–8 June 2007
ISBN: 1-55752-841-1

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Optical Monitoring (WC)

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K. Wu, S. Chen, M. Chang, and C. Lee, "Sensitive optical monitoring with error compensation," in Optical Interference Coatings, OSA Technical Digest (CD) (Optica Publishing Group, 2007), paper WC6.

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Abstract

A way to calculate fluctuant refractive indices and thickness compensation during the deposition has been proposed. A novel monitor method was thereby derived, and a narrow band pass filter with excellent performance has been demonstrated.

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