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Conferences > OIC > 2007 > WC > WC9

Multi-wavelength optical monitoring for infrared complex functions: Application to process improvement

C. Grèzes-Besset, N. Valette, H. Krol, D. Torricini, F. Chazallet, J. Poupard, L. Gallais, J.Y. Natoli, and M. Commandré

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Abstract

Use of an infrared direct optical monitoring is presented for realization of complex stacks requiring optical performances on different spectral ranges for infrared applications. Such system is used for process improvement in laser damage application.

© 2007 Optical Society of America

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