UV- and VIS Filter Coatings by Plasma Assisted Reactive Magnetron Sputtering (PARMS)

M. Scherer; J. Pistner; W. Lehnert

doi:10.1364/OIC.2010.MA7

Optical Interference Coatings
OSA Technical Digest (Optica Publishing Group, 2010),
paper MA7
•https://doi.org/10.1364/OIC.2010.MA7

UV- and VIS Filter Coatings by Plasma Assisted Reactive Magnetron Sputtering (PARMS)

M. Scherer, J. Pistner, and W. Lehnert

Optical Interference Coatings 2010

Tucson, Arizona United States
6–11 June 2010
ISBN: 978-1-55752-891-9

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M. Scherer, J. Pistner, and W. Lehnert, "UV- and VIS Filter Coatings by Plasma Assisted Reactive Magnetron Sputtering (PARMS)," in Optical Interference Coatings, OSA Technical Digest (Optica Publishing Group, 2010), paper MA7.

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Abstract

The advantage of PARMS for the manufacturing of high performance low loss coatings is demonstrated with UV- and VIS band pass filter based on HfO2 respectively Nb2O5 and SiO2.

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