Abstract
Light scattering measurement and analysis based on a simplified scatter model for multilayer coatings is used to investigate structural and alteration effects of HR coatings for 193 nm as well as Rugate filters for 355 nm.
© 2010 Optical Society of America
PDF ArticleMore Like This
Ian Hodgkinson, Flavio Horowitz, Angus Macleod, Marten Sikkens, and John Wharton
ThA2 Optical Interference Coatings (OIC) 1984
Sven Schröder, David Unglaub, Marcus Trost, and Angela Duparré
ThD.8 Optical Interference Coatings (OIC) 2013
T. Herffurth, S. Schröder, K. Täschner, H. Bartzsch, P. Frach, A. Duparré, and A. Tünnermann
WD.9 Optical Interference Coatings (OIC) 2013