Optical Monitor with Computed Compensation

William H. Southwell

doi:10.1364/OIC.2010.TuC2

Optical Interference Coatings
OSA Technical Digest (Optica Publishing Group, 2010),
paper TuC2
•https://doi.org/10.1364/OIC.2010.TuC2

Optical Monitor with Computed Compensation

William H. Southwell

Optical Interference Coatings 2010

Tucson, Arizona United States
6–11 June 2010
ISBN: 978-1-55752-891-9

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Optical Monitoring (TuC)

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W. H. Southwell, "Optical Monitor with Computed Compensation," in Optical Interference Coatings, OSA Technical Digest (Optica Publishing Group, 2010), paper TuC2.

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Abstract

This optical monitor uses an analytic reflectance model and fits the thickness error of the previous layer. The computed compensation (the current and next layer) may be applied for wavelengths other than the monitor wavelength.

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