Hybrid Process Control for Precision Optics Enhanced by Computational Manufacturing

H. Ehlers; S. Schlichting; C. Schmitz; D. Ristau

doi:10.1364/OIC.2010.TuC6

Optical Interference Coatings
OSA Technical Digest (Optica Publishing Group, 2010),
paper TuC6
•https://doi.org/10.1364/OIC.2010.TuC6

Hybrid Process Control for Precision Optics Enhanced by Computational Manufacturing

H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau

Optical Interference Coatings 2010

Tucson, Arizona United States
6–11 June 2010
ISBN: 978-1-55752-891-9

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Optical Monitoring (TuC)

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H. Ehlers, S. Schlichting, C. Schmitz, and D. Ristau, "Hybrid Process Control for Precision Optics Enhanced by Computational Manufacturing," in Optical Interference Coatings, OSA Technical Digest (Optica Publishing Group, 2010), paper TuC6.

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Abstract

Optical broadband monitoring (BBM) and quartz crystal monitoring are merged into an advanced hybrid process control. In addition, an adapted virtual deposition system covering both optical and non-optical monitoring ensures maximum stability and precision.

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