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Multi-wavelength Laser Ellipsometer for in-situ Monitoring of Optical Coatings

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Abstract

A multichannel ellipsometer with several multiplexed lasers operating at different wavelengths was developed. The ellipsometer has a number of advantages such as high signal-to-noise ratio, precisely known and stable wavelengths with small linewidths and simple electronics.

© 2010 Optical Society of America

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