Characterization and fabrication of IR coatings using visible-near IR ellipsometery and quartz crystal monitoring

Li Li; Yanen Guo; Claude Montcalm

doi:10.1364/OIC.2010.TuD6

Optical Interference Coatings
OSA Technical Digest (Optica Publishing Group, 2010),
paper TuD6
•https://doi.org/10.1364/OIC.2010.TuD6

Characterization and fabrication of IR coatings using visible-near IR ellipsometery and quartz crystal monitoring

Li Li, Yanen Guo, and Claude Montcalm

Optical Interference Coatings 2010

Tucson, Arizona United States
6–11 June 2010
ISBN: 978-1-55752-891-9

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Deposition Control and Applications (TuD)

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L. Li, Y. Guo, and C. Montcalm, "Characterization and fabrication of IR coatings using visible-near IR ellipsometery and quartz crystal monitoring," in Optical Interference Coatings, OSA Technical Digest (Optica Publishing Group, 2010), paper TuD6.

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Abstract

Optical constants of ZnSe, Ge, and BaF₂ films in the IR spectral region from 2 to 16 µm were determined using ellipsometery and spectrophotometery. Broadband IR coatings from 8 to 15.5 µm were fabricated by e-beam evaporation with accurate quartz crystal thickness monitoring.

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