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Conferences > OIC > 2010 > WA > WA12

Thermal effect in UV-O3 treatment used for synthesis of mesoporous silica films

Yumei Zhu, Jun Shen, and Bin Ma

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Abstract

We synthesized mesoporous silica films via sol-gel method with CTAB as organic template. UV-O3 treatment was employed to eliminate organic template at different temperatures. The UV-O3 treated film showed less shrinkage and no significant distortion.

© 2010 Optical Society of America

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