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Conferences > OIC > 2010 > WA > WA8

Microstructure and Optical Properties of Al2O3 Prepared by Oblique Deposition Using Nanosphere Shell as Templates

Wen-Hao Cho, Chao-Te Lee, Chih-Chieh Yu, Chi-Chung Kei, Da-Ren Liu, and Cheng-Chung Lee

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Abstract

Inclined Al2O3 column array was fabricated by using hollow nanosphere template. Birefringence and photonic crystals behavior can be observed in the orderly inclined column array. Compared to substrate without patterns, photonic crystals property was enhanced.

© 2010 Optical Society of America

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