Metal-oxide Ultraviolet Narrow-band-pass Filter at 214 nm

Georg Ockenfuss

doi:10.1364/OIC.2013.FC.7

Optical Interference Coatings
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper FC.7
•https://doi.org/10.1364/OIC.2013.FC.7

Metal-oxide Ultraviolet Narrow-band-pass Filter at 214 nm

Georg Ockenfuss

Optical Interference Coatings 2013

Whistler Canada
16–21 June 2013
ISBN: 978-1-55752-970-1

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G. Ockenfuss, "Metal-oxide Ultraviolet Narrow-band-pass Filter at 214 nm," in Optical Interference Coatings, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optica Publishing Group, 2013), paper FC.7.

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Abstract

We demonstrate a metal-oxide based narrow-band-pass filter at 214 nm deposited with reactive magnetron sputtering with a peak transmission of 48%, a bandwidth of 4.8 nm and an average blocking of OD4 from 220 nm to 750 nm.

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