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Conferences > OIC > 2013 > PTE > PTE.8

Low-cost automatic system for the control of the surface quality of coated and uncoated wafers

Alexandre Joerg, Julien Lumeau, Myriam Zerrad, and Michel Lequime

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Abstract

An automatic system for the characterization of the surface quality of wafers is presented. It is based on the imaging of the surface defects scattered light. Detailed procedure and experimental data are presented.

© 2013 Optical Society of America

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