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A hybrid inorganic-organic barrier film deposited by magnetron sputtering

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A magnetron sputtering system with plasma polymerized organic monomer was developed. The barrier films, the best WVTR value of 7.6×10−2 g/m2/day, was deposited by magnetron sputtering coupled with HMDSO/O2 plasma polymerization.

© 2013 Optical Society of America

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