In-Situ control of stress in IBS deposition processes

Stefan Günster; Detlev Ristau

doi:10.1364/OIC.2013.ThB.2

Optical Interference Coatings
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper ThB.2
•https://doi.org/10.1364/OIC.2013.ThB.2

In-Situ control of stress in IBS deposition processes

Stefan Günster and Detlev Ristau

Optical Interference Coatings 2013

Whistler Canada
16–21 June 2013
ISBN: 978-1-55752-970-1

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Sputter Deposition (ThB)

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S. Günster and D. Ristau, "In-Situ control of stress in IBS deposition processes," in Optical Interference Coatings, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optica Publishing Group, 2013), paper ThB.2.

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Abstract

In situ optical monitoring is widely used in modern high precision optical coating deposition. In Situ control of mechanical properties has the potential to be one of the next steps to a deterministic deposition process. The versatility of an in situ stress control in an IBS coating deposition process is presented in this study.

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