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Thin Silver Refractive Index Calculation from Ellipsometry and Resistivity

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Abstract

The refractive index (RI) of thin silver (Ag) films was found to strongly depend upon the thickness. Ellipsometry could accurately measure thin Ag RI, but involved complicated measurements and model fitting. However, at wavelength >550nm, the Drude model can provide a good estimation of Ag RI and also the dielectric constant. The experimental data also indicated that electron scattering times and resistivity products are nearly constant in the experimental region. Using those observations, we can theoretically simplify the Ag RI calculation, to derive a relationship between Ag RI and resistivity. This observation allow for a quick estimatation of the thin Ag RI spectra.

© 2013 Optical Society of America

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