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Conferences > OIC > 2013 > ThC > ThC.7

Sub-aperture stitching interferometry for measurement of shape error of big aperture coatings

Xu Xudong, Shen Zhengxiang, Sun Xiaoyan, Ma Shuang, Wang Xiaoqiang, Wang ZhanShan, Liu Huasong, and Ji Yiqin

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Abstract

A stitching interferometry based on Zernike polynomials offsetting the reference wavefront error and deviation is introduced to measure the shape errors of big aperture coating. A planate coating with size 150mm×120mm is prepared for an experiment.

© 2013 Optical Society of America

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