Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > OIC > 2013 > WA > WA.2

Nb2O5-SiO2 mixtures produced by reactive DC and RF magnetron sputtering

Kęstutis Juškevičius, Martynas Audronis, Andrius Subačius, Simonas Kičas, Tomas Tolenis, Rytis Buzelis, and Ramutis Drazdys

Not Accessible

Your library or personal account may give you access

Abstract

Optical and physical properties of magnetron sputtered Nb2O5-SiO2 mixtures are reported. Deposition rate and properties of mixtures produced were improved significantly by using fast feedback reactive sputtering process control.

© 2013 Optical Society of America

PDF Article
More Like This
Characterization of WO3-Nb2O5 composite films prepared by bipolar pulsed dual magnetron sputtering

Chien-Jen Tang, Ching-Hung Chou, Yong-Wei Hsu, and Cheng-Chung Jaing
WA.8 Optical Interference Coatings (OIC) 2013

Properties of films produced by modulated-dc-magnetron sputtering

B. J. Pond, T. Du, J. Sobczak, and C. K. Carniglia
FH6 OSA Annual Meeting (FIO) 1992

Particle generation during reactive magnetron sputtering of SiO2 with cylindrical and planar cathodes

M. Vergöhl and D. Rademacher
TuD3 Optical Interference Coatings (OIC) 2010

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use