Abstract

In this study, Al₂O₃/MgO/Al₂O₃ structures were fabricated using electron beam evaporation and 800°C post-annealing treatments were carried out. According to the inter-diffusion, the MgO layer became a low refractive index material with porous structure and the MgAl₂O₄ spinel was formed as high refractive index material and the refractive index contrast of the multilayer was increased. The feasibility of solid state diffusion in multilayer film was demonstrated after the 800°C post-annealing of the (Al₂O₃ MgO)⁸ Al₂O₃ multilayer structure.

© 2016 Optical Society of America