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Conferences > OIC > 2016 > TA > TA.11

Fabrication of broadband antireflection coating using quartz monitor

Siyu Dong, Hongfei Jiao, Ganghua Bao, Jinlong Zhang, Tao Ding, Xinbin Cheng, and Zhanshan Wang

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Abstract

Through reverse engineering of the fabricating the broadband antireflection coating, the error compensation strategy in quartz crystal monitoring was proposed. And its accuracy and importance throughout the fabrication process is also demonstrated.

© 2016 Optical Society of America

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