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Roughness evolution of multilayer coatings for 6.7 nm and its impact on light scattering

Marcus Trost, Sven Schröder, Sergiy Yulin, and Angela Duparré

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Abstract

The roughness evolution as well as its impact on the light scattering properties of La/B4C and Ru/B4C multilayer coatings for a wavelength of 6.7 nm are studied by analyzing multilayer stacks with different numbers of layers.

© 2016 Optical Society of America

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