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Conferences > OIC > 2016 > TB > TB.11

Evaluation of niobium titanium oxide optical thin films

Saki Narita, Tomoko Miyakawa, and Hiroshi Murotani

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Abstract

Niobium titanium oxide is the new high refractive index material for optical thin films. Films with good characteristics were obtained at a substrate temperature of 50 °C and an oxygen flow rate of 30 sccm.

© 2016 Optical Society of America

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