Stress analysis in thin films: towards perfectly compensated mirrors

Thomas Begou; Julien Lumeau

doi:10.1364/OIC.2016.TD.5

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper TD.5
•https://doi.org/10.1364/OIC.2016.TD.5

Stress analysis in thin films: towards perfectly compensated mirrors

Thomas Begou and Julien Lumeau

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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Ultrafast Mirrors, Transparent and Conducting Coatings (TD)

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T. Begou and J. Lumeau, "Stress analysis in thin films: towards perfectly compensated mirrors," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper TD.5.

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Abstract

We present a study on stress induced by layers deposited by magnetron sputtering. The aim is to model accurately the stress evolution in mirrors under manufacturing to optimize perfectly the final deformation of the component.

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