Abstract
We demonstrate a method based on carrier frequency interferometry that measures surface deformation with high accuracy. The method is applied to assess deformation in thin films and multilayer dielectric coatings deposited on thick substrates.
© 2016 Optical Society of America
PDF ArticleMore Like This
E. Jankowska, S. Drobczynski, and C.S. Menoni
JTu5A.116 CLEO: Applications and Technology (CLEO:A&T) 2017
Chuen-Lin Tien, Po-Chih Chen, Kuei-Luen Chen, Chien-Jen Tang, Sheng-Hua Lu, and Shih-Chin Lin
ThD.12 Optical Interference Coatings (OIC) 2016
Karolis Balskus, Melissa Fleming, Richard A. McCracken, Zhaowei Zhang, and Derryck T. Reid
SM1H.5 CLEO: Science and Innovations (CLEO:S&I) 2016