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On the Optical Distinction of an Air-TiO2 Interface on (native oxide)/Si

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Abstract

Optical distinction of an Air-TiO2 interface on Si is addressed, using ALD, ellipsometry and Abelès method extended for angular spectrophotometry. If TiO2 optical thickness/wavelength: <1/28, optical coating behavior becomes questionable; <1/36, the interface becomes undetectable.

© 2016 Optical Society of America

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