Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optical properties of sputter deposited amorphous hydrogenated silicon films

Not Accessible

Your library or personal account may give you access

Abstract

Optical properties of room temperature microwave plasma pulsed DC sputter deposited amorphous hydrogenated silicon are presented. Results show controllable and reproducible reduction in absorption edge and refractive index with increasing hydrogen.

© 2016 Optical Society of America

PDF Article
More Like This
Deposition of amorphous hydrogenated silicon carbide thin films by ion beam sputtering

J. D. Targove and L. G. Sills
TuPP1 OSA Annual Meeting (FIO) 1991

Optical and Structural Properties of Amorphous Silicon Coatings deposited by Magnetron Sputtering

S. Bruynooghe, N. Schmidt, M. Sundermann, H.W. Becker, and S. Spinzig
ThA9 Optical Interference Coatings (OIC) 2010

Electrochromic and optical properties of tungsten oxide films deposited with DC sputtering by introducing of hydrogen

Hsi-Chao Chen, Der-Jun Jan, Yu-Siang Luo, and Kuo-Ting Huang
WC.9 Optical Interference Coatings (OIC) 2013

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved