Optical Coating Uniformity of 200 mm (8”) Diameter Precut Wafers

Travis Burt; Fabian Zieschang

doi:10.1364/OIC.2016.ThC.5

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper ThC.5
•https://doi.org/10.1364/OIC.2016.ThC.5

Optical Coating Uniformity of 200 mm (8”) Diameter Precut Wafers

Travis Burt and Fabian Zieschang

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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Characterization and Optical Properties (ThC)

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T. Burt and F. Zieschang, "Optical Coating Uniformity of 200 mm (8”) Diameter Precut Wafers," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper ThC.5.

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Abstract

Knowledge of the spatial optical coating uniformity of pre diced 200 mm wafers is helpful to control product quality and yield. Spectroscopic profiles collected using an automated absolute reflection spectrophotometer are presented.

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