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Conferences > OIC > 2016 > ThD > ThD.4

Optical, Structural and Mechanical Properties of Silicon-Oxynitride Films Prepared by Pulsed Magnetron Sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Chuen-Lin Tien, Wei-Chiang Sun, and Shih-Chin Lin

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Abstract

The silicon-oxynitride films were deposited by pulsed-magnetron-sputtering. The optical, structural and Mechanical Properties of silicon-oxynitride films were analyzed via spectroscopy, AFM, Twyman-Green interferometer and nanoindentation. It could be used for antireflection coatings with high hardness.

© 2016 Optical Society of America

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