Abstract

Modeling of optical interference coatings requires an accurate description of film optical properties. This can become challenging if the layers are inhomogeneous, because the optical properties change as a function of physical thickness. An effective approach to developing a film model which includes index of refraction changes as a function of physical thickness is proposed and demonstrated for HfO₂ and MgF₂ single layer films. The single layer models are then used to accurately predict and optimize the spectral performance of visible broadband antireflection coatings.

© 2016 Optical Society of America