Sputter material distribution in IBS deposition systems

Stefan Günster; Tarik Kellermann; Detlev Ristau

doi:10.1364/OIC.2016.WA.3

Optical Interference Coatings 2016
OSA Technical Digest (online) (Optica Publishing Group, 2016),
paper WA.3
•https://doi.org/10.1364/OIC.2016.WA.3

Sputter material distribution in IBS deposition systems

Stefan Günster, Tarik Kellermann, and Detlev Ristau

Optical Interference Coatings 2016

Tucson, Arizona United States
19–24 June 2016
ISBN: 978-1-943580-13-2

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Deposition I - Sputtering and IAD (WA)

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S. Günster, T. Kellermann, and D. Ristau, "Sputter material distribution in IBS deposition systems," in Optical Interference Coatings 2016, OSA Technical Digest (online) (Optica Publishing Group, 2016), paper WA.3.

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Abstract

The quality and spatial distribution of IBS coatings is determined by beam parameters, ion type, and target material. In this work the distributions of optical properties of coated materials in the substrate plane are reported.

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