Abstract
We applied low-duty cycle pulsed magnetron reactive sputtering of an Al target to achieve stable deposition of transparent Al2O3 films and AlN films with high density, high hardness, and low stress at deposition rates of ~60 nm/min.
© 2016 Optical Society of America
PDF ArticleMore Like This
Chien-Jen Tang, Cheng-Chung Jaing, Chuen-Lin Tien, Wei-Chiang Sun, and Shih-Chin Lin
ThD.4 Optical Interference Coatings (OIC) 2016
Chien-Jen Tang, Ching-Hung Chou, Yong-Wei Hsu, and Cheng-Chung Jaing
WA.8 Optical Interference Coatings (OIC) 2013
Chuen-Lin Tien, Po-Chih Chen, Kuei-Luen Chen, Chien-Jen Tang, Sheng-Hua Lu, and Shih-Chin Lin
ThD.12 Optical Interference Coatings (OIC) 2016