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Conferences > OIC > 2016 > WA > WA.8

High throughput PIAD with an advanced RF-plasma source and direct optical monitoring

A. Zöller, D. Arhilger, M. Boos, H. Hagedorn, and H. Reus

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Abstract

High throughput and accuracy of a PIAD coating system with a large dome and an advanced RF-plasma source is demonstrated. Thickness monitoring was performed with a newly developed wideband monitoring system.

© 2016 Optical Society of America

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