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Investigation of the Biaxial Stress and Optoelectronic Properties of AZO Thin Films with Radio Frequency Sputtering

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Abstract

Al-doped ZnO (AZO) thin films were deposited on different both flexible substrates and temperatures with radio frequency (RF) magnetron sputtering. The biaxial stress and optoelectronic properties were investigated for transparent conductive film.

© 2016 Optical Society of America

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