Abstract
A spectrally-extended Abelès method was used for probing ALD deposited TiO2 films on native oxide/Si, whose AFM imaged nanotopology was approximately followed. Cauchy fitting to the experimental data was possible until ~1/10 quarterwave optical thickness.
© 2019 The Author(s)
PDF ArticleMore Like This
Marcelo B. Pereira, Gustavo R. Toniello, and Flavio Horowitz
ThC.11 Optical Interference Coatings (OIC) 2016
Pallabi Paul, Golam Hafiz, Andreas Tünnermann, and Adriana Szeghalmi
NoM2C.4 Novel Optical Materials and Applications (NOMA) 2020
Qing-Yuan Cai, Ling-Shan Gao, Hai-Han Luo, Rui Cong, and Ding-Quan Liu
FB.5 Optical Interference Coatings (OIC) 2019