Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance

Sam Ahmadzadeh; Sam Ahmadzadeh; Des Gibson; Des Gibson; Lewis Fleming; Lewis Fleming; David Hutson; David Hutson; Greg Mcgann; Greg Mcgann; Shigeng Song; Shigeng Song; Ameen Belke; Allan James; Stephen Wells; Alan Forsyth; Suzanne Bruckshaw

doi:10.1364/OIC.2022.MC.4

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper MC.4
•https://doi.org/10.1364/OIC.2022.MC.4

Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance

Sam Ahmadzadeh, Des Gibson, Lewis Fleming, David Hutson, Greg Mcgann, Shigeng Song, Ameen Belke, Allan James, Stephen Wells, Alan Forsyth, and Suzanne Bruckshaw

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

From the session
Green Applications and Thermal Radiation II (MC)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
S. Ahmadzadeh, D. Gibson, L. Fleming, D. Hutson, G. Mcgann, S. Song, A. Belke, A. James, S. Wells, A. Forsyth, and S. Bruckshaw, "Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MOEMS based CMOS thermopile performance," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper MC.4.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

Absorber optical coating with maximised broadband infrared absorptance is deposited using pulsed DC sputter deposited hydrogenated carbon. Application to MOEMS CMOS thermopile device is demonstrated with thermopile device output increased 220%.

PDF Article

More Like This

Durable infrared optical coatings based on pulsed DC sputtering of hydrogenated carbon

Des Gibson, Lewis Fleming, Shigeng Song, Hin On Chu, Cheng Li, Sam Ahmadzadeh, Ryan Swindell, Xiaoling Zhang, Parnia Navabpour, Caspar Clark, and Mark Bailey
MC.10 Optical Interference Coatings (OIC) 2019

Microwave Plasma Assisted Magnetron Sputtering of Infrared Multilayer Thin Film Bandpass Filters for application in non-dispersive infrared gas sensors

Jonathan Pomfret, Des Gibson, Lewis Fleming, Shigeng Song, Greg McGann, Sam Ahmadzadeh, and Peter Mackay
ThC.7 Optical Interference Coatings (OIC) 2022

Optical properties of sputter deposited amorphous hydrogenated silicon films

Des Gibson, Shigeng Song, Cheng Li, and David Child
ThC.2 Optical Interference Coatings (OIC) 2016

Previous Article Next Article