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Conferences > OIC > 2022 > WB > WB.2

Tantalum Oxide and Silica Mixture Coatings Deposited Using Microwave Plasma Assisted Co-sputtering for Optical Mirror Coatings in Gravitational Wave Detectors

Shigeng Song, Sijia Cai, Daxing Han, Carlos García Nuñez, Gong Zhan, Gavin Wallace, Lewis Fleming, Kieran Craig, Stuart Reid, Iain Martin, Sheila Rowan, and Des Gibson

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Abstract

This work presents the characterisation of optical and mechanical properties of thin films based on (Ta2O5)1-x(SiO2)x mixed oxides deposited by microwave plasma assisted co-sputtering to demonstrate their potential as optical coatings in gravitational wave detectors.

© 2022 The Author(s)

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