High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

Greig Oliver; Greig Oliver; Jonathan Pomfret; Jonathan Pomfret; Des Gibson; Des Gibson; Lewis Fleming; Lewis Fleming; Sam Ahmadzadeh; Greg Mcgann; Greg Mcgann; Shigeng Song; Shigeng Song; Parnia Navabpour; Hailin Sun; Peter Mackay

doi:10.1364/OIC.2022.WD.4

Optical Interference Coatings Conference (OIC) 2022
Technical Digest Series (Optica Publishing Group, 2022),
paper WD.4
•https://doi.org/10.1364/OIC.2022.WD.4

High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors

Greig Oliver, Jonathan Pomfret, Des Gibson, Lewis Fleming, Sam Ahmadzadeh, Greg Mcgann, Shigeng Song, Parnia Navabpour, Hailin Sun, and Peter Mackay

Optical Interference Coatings 2022

Whistler, British Columbia Canada
19–24 June 2022
ISBN: 978-1-957171-04-3

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Deposition Technology Research for Non-Conventional Properties of Optical Coatings (WD)

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G. Oliver, J. Pomfret, D. Gibson, L. Fleming, S. Ahmadzadeh, G. Mcgann, S. Song, P. Navabpour, H. Sun, and P. Mackay, "High throughput low cost closed field magnetron sputter deposition of durable reflectors based on dielectric overcoated metal for application in non-dispersive infrared gas sensors," in Optical Interference Coatings Conference (OIC) 2022, R. Sargent and A. Sytchkova, eds., Technical Digest Series (Optica Publishing Group, 2022), paper WD.4.

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Abstract

Optical & mechanical properties of closed-field magnetron pulsed DC sputter deposited Al, Au & Ag with Al₂O₃ protective layer are presented. Results show optical & durability performance suitable for use within NDIR optical gas sensors.

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