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Diffractive lens for controlling the focal length and depth of focus by using binary structure of grating and diffractive condenser lens for laser processing application

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The focus controlling diffractive lens that could control the focal length and depth of focus was designed and was fabricated by electron beam lithography technique. Evaluating the intensity distribution of the lens, the change of the peak position and full width half maximum were observed by changing structure. This result is consistent with the simulation. Therefore, the focal length and depth of focus could be controlled by the structure.

© 2018 Optical Society of Japan

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