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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper PThA3

Laser Cleaning by Attenuated Total Internal Reflection

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Abstract

Theoretical studies and preliminary experiments indicate that the efficiency of laser cleaning can be significantly improved by irradiating surface contaminants from within the substrate under conditions of total internal reflection.

© 2004 Optical Society of America

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