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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper PThC3

The Future of Optical Lithography

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Paths to higher resolution in optical microlithography will be described and compared. These include process enhancement technologies, higher performance optics and shorter wavelength imaging. Future developments and the limits of optical microlithography will be examined.

© 2004 Optical Society of America

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