SLS is a pulsed-laser-based crystallization technique that can be used to produce low defect-density polycrystalline Si films for high-performance TFTs on glass substrates. In this talk, we will discuss the following topics: (1) Excimer-laser-based SLS manufacturing system from JSW; (2) Roadmap for future SLS manufacturing echnology; and (3) Recent advances in SLS research and their implications.
© 2004 Optical Society of AmericaPDF Article
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