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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper PTuB2

State-of-the-art of laser annealing of Si for FPD applications

Open Access Open Access


SLS is a pulsed-laser-based crystallization technique that can be used to produce low defect-density polycrystalline Si films for high-performance TFTs on glass substrates. In this talk, we will discuss the following topics: (1) Excimer-laser-based SLS manufacturing system from JSW; (2) Roadmap for future SLS manufacturing echnology; and (3) Recent advances in SLS research and their implications.

© 2004 Optical Society of America

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