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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper PWE2

Laser Processing for Wide Bandgap Semiconductor Device Fabrication

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Laser direct write of imbedded Ohmic conductors by phase transformation and laser doping are introduced as tools for wide bandgap semiconductor device fabrication. Fabrication of a Schottky-diode signal mixer using these technologies is presented.

© 2004 Optical Society of America

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