Laser Processing for Wide Bandgap Semiconductor Device Fabrication

A. Kar; N. R. Quick

Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
Technical Digest (CD) (Optica Publishing Group, 2004),
paper PWE2

Laser Processing for Wide Bandgap Semiconductor Device Fabrication

A. Kar and N. R. Quick

Photonic Applications Systems Technologies Conference 2004

San Francisco, California United States
ISBN: 1-55752-770-9

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Lasers in Manufacturing IV (PWE)

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A. Kar and N. R. Quick, "Laser Processing for Wide Bandgap Semiconductor Device Fabrication," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optica Publishing Group, 2004), paper PWE2.

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Abstract

Laser direct write of imbedded Ohmic conductors by phase transformation and laser doping are introduced as tools for wide bandgap semiconductor device fabrication. Fabrication of a Schottky-diode signal mixer using these technologies is presented.

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